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Micrometer-scale magnetometry of thin Ni80Fe20 films using ultra-sensitive microcantilevers

Published

Author(s)

Michelle D. Chabot, John M. Moreland

Abstract

Microcantilever torque magnetometry is used to measure quantitative M-H curves on patterned Ni80Fe20 films. The dynamic deflection method is employed, in which a small film is deposited onto a microcantilever and placed in an external magnetic field. A small orthogonal ac torque field is applied at the cantilever resonant frequency, and the resulting torque is measure as a function of external field. Cantilever fabrication has been integrated with film deposition. Results are presented for a 5 micron x 5 micron x 30 nm NiFe film. The measured saturated magnetic moment of the sample si 5.1 × 10-13 ± 2 × 10-14 Am2 for a 100 A/m torque filed. The M-H curves for the smaller films show hysteretic switching consistent with a series of stable multi-domain states. Values of the saturation magnetization are within 3% of the value measured on similar samples by ferromagnetic resonance, indicating this is a sensitive method for measuring magnetic reversal in small ferromagnetic samples.
Citation
Journal of Applied Physics
Volume
93
Issue
10

Keywords

cantilever magnetometry, micromechanical systems, patterned films
Created May 15, 2003, Updated February 19, 2017