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Micro-Texture of a BaTiO3 Thin Film Fabricated by Pulsed Laser Deposition on a Pt/Ti/SiO2/Si Substrate



Y E. Lee, Mark D. Vaudin, Peter K. Schenck, B Hockey


A BaTiO3 polycrystalline thin film was fabricated by pulsed laser deposition on a Pt/Ti/SiO2/Si substrate. X-ray diffraction suggested that the film contained mixed orientations of (100), (111), and (110). The microstructure and interface between the BaTiO3 film and the Pt substrate have been investigated to elucidate the formation mechanism of the differently oriented grains using conventional and high-resolution transmission electron microscopy. The three orientations of BaTiO3 on Pt surfaces, (100), (111), and (110), were closely correlated with the presence or absence of an amorphous interfaial layer, and also with twinning. It was found that (111)-oriented BaTiO3 grew on clean crystalline (111)-oriented Pt surfaces, while an amorphous interfacial layeer favored growth of (100)-oriented BaTiO3. Formation of (110)-oriented BaTiO3 was observed to occur by 111} multiple twinning of (111) BaTiO3. This twinning played a ignificantly important role on texture formation.
Journal of Materials Research


amorphous layer, barium titanate, texture, thin film, twinning


Lee, Y. , Vaudin, M. , Schenck, P. and Hockey, B. (2017), Micro-Texture of a BaTiO<sub>3</sub> Thin Film Fabricated by Pulsed Laser Deposition on a Pt/Ti/SiO<sub>2</sub>/Si Substrate, Journal of Materials Research (Accessed April 12, 2024)
Created February 19, 2017