Author(s)
John R. Lawall, Ernest G. Kessler
Abstract
We demonstrate a new heterodyne Michelson interferometer design for displacement measurements capable of fringe interpolation accuracy of one part in 36,000. Key to this level of accuracy are the use of two accousto-opic modulators for heterodyne frequency generation and digital signal processing demodulation electronics. We make a direct comparison of our interferometer to a commercial interferometer based on a Zeeman-stabilized laser, and show that the residual periodic errors in ours are two orders of magnitude lower than those in the commercial unit. We discuss electronically-induced optical crosstalk and optical feedback as sources of periodic error. Our new interferometer is simple, robust, and readily implemented.
Citation
Review of Scientific Instruments
Keywords
displacement measurement, heterodyne, high resolution, Michelson interferometer
Citation
Lawall, J.
and Kessler, E.
(2000),
Michelson Interferometry With 10 PM Accuracy, Review of Scientific Instruments (Accessed May 13, 2026)
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