New metrology tools to measure the critical parameters of internal structures in lab on a chip devices are greatly needed in order to develop standard tests for this technology. Here we present a method that combines a custom made optical coherence tomography (OCT) system with an in-house written ImageJ macro to analyze internal structures of poly(methyl methacrylate) (PMMA) final product devices. Dimensional information was obtained from OCT images and compared with images acquired using confocal reflectance and confocal fluorescence microscopies. Although there is no established method for dimensional measurements of lab on a chip final product devices when OCT and confocal fluorescence microscopy, a well established technique for measuring fluorescent fluids within microchannels, were compared the values obtained from both techniques were remarkably similar.
Proceedings Title: Proceedings of NanoTech Conference 2013
Conference Dates: May 12-16, 2013
Conference Location: National Harbor, MD
Conference Title: Nanotech Conference 2013
Pub Type: Conferences
dimensional metrology, lab on a chip, microfluidic devices, PMMA, optical coherence tomography, confocal fluorescence microscopy