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MEMS Sensors for HVAC&R: Small, Fast, Cheap (in Polish)



David A. Yashar, Piotr A. Domanski


Microelectronic mechanical systems (MEMS) have revolutionized the market for sensors by providing small, fast-responding measurement devices at low cost. They have been widely accepted in several common products. As an example, today's automobile uses between 25 and 70 MEMS sensors to gather information where traditional macroscale sensors would be far too expensive to use.1 Increasing pressure for improved operating efficiency and reliability of HVAC&R equipment will promote the use of MEMS sensors in comprehensive fault detection and diagnostics (FDD) schemes. The combination of MEMS sensors, FDD, and networking capabilities has the potential to change the way refrigeration and air-conditioning systems are monitored and serviced.
ASHRAE Journal


sensors, costs, viscosity, flow velocity, pressure drop


Yashar, D. and Domanski, P. (2006), MEMS Sensors for HVAC&R: Small, Fast, Cheap (in Polish), ASHRAE Journal, [online], (Accessed May 28, 2024)


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Created August 1, 2006, Updated February 19, 2017