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Measuring Interfacial Roughness by Polarized Optical Scattering

Published

Author(s)

Thomas A. Germer

Abstract

Polarized optical scatter measurements yield information that can be used to identify sources of scatter. In this chapter, we review measurements of angle-resolved polarized optical scattering and their application to the measurement of roughness of surfaces and thin films.
Proceedings Title
Springer| 2006
Conference Dates
September 1, 2005
Conference Title
Light Scattering and Nanoscale Roughness

Keywords

bidirectional reflectance, distribution function, interfacial roughness, nanotechnology, polarization, rough surfaces, thin film

Citation

Germer, T. (2005), Measuring Interfacial Roughness by Polarized Optical Scattering, Springer| 2006, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841926 (Accessed April 15, 2024)
Created October 10, 2005, Updated February 17, 2017