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Measuring Bimodal Crystallographic Texture in Ferroelectric PZT Thin Films



Mark D. Vaudin, G R. Fox


A powder x-ray diffraction method has been developed to measure the volume fraction of (111), (100), and randomly oriented PZT in 200 nm thick films used for FRAM applications. The integrated and peak intensities of 100, 110, 200 and 222 Bragg peaks from untextured PZT were determined from a 0-20 scan obtained from random powder of the same composition as the film. X-ray scans were made on the same peaks from PZT film specimens. The distributions of grain orientation for the (111) and (100) populations in the film were determined from 2 scans obtained from the films using 100, 200 and 222 scattering angles. To determine the total volume fraction of each population of grains, the rocking curve profiles were integrated peak intensities. Texture data collected from selected PZT thin film specimens are discussed.
Proceedings of the MRS Symposium


omega scan, powder diffractometer, PZT, texture, thin films


Vaudin, M. and Fox, G. (2000), Measuring Bimodal Crystallographic Texture in Ferroelectric PZT Thin Films, Proceedings of the MRS Symposium (Accessed April 19, 2024)
Created February 1, 2000, Updated February 19, 2017