Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Magnetic Tunnel Junctions Fabricated Using Ion Neutralization Energy as a Tool

Published

Author(s)

Joshua M. Pomeroy, Holger Grube, Pei-Ling Sun, Yun-Che Wang, Russell E. Lake

Abstract

The neutralization energy of highly charged ions (HCIs) is used as an intermediate processing step to modify the electrical properties of magnetic tunnel junctions (MTJs), providing an additional degree of freedom in the devices’ fabrication. While most ion species used in common semiconductor processes (like implantation or plasma cleaning/oxidation) have negligible neutralization energies, the HCIs utilized in this work carry as much as 52 keV per HCI of neutralization energy, ample to modify the chemical and electrical properties of the tunnel barriers at the impact site. Hundreds of MTJ devices have been fabricated, revealing some general characteristics of the HCI modified tunnel junctions: the electrical conductance increases linearly with the number of HCIs used; the conductance added per HCI depends on the tunnel barrier thickness, the barrier stoichiometry, and the HCI charge state; in most cases studied, the transport characteristic remains tunneling (vs. diffusive); and the conductance added by the HCI process can substantially increase the magneto-conductance.
Proceedings Title
AIP Conference
Volume
1336
Conference Dates
August 2-6, 2010
Conference Location
Ft. Worth, TX
Conference Title
CAARI 2010 - 21st International Conference on the Applicationof Accelerators in Research and Industry

Keywords

Highly Charged Ions, Magnetic tunnel junctions, Ion-solid interactions
Created July 25, 2011, Updated February 19, 2017