Low-loss superconducting resonant circuits using vacuum-gap -based microwave components

Published

March 4, 2010

Author(s)

Katarina Cicak, Dale Li, Joshua Strong, Michael S. Allman, Fabio Altomare, Adam J. Sirois, Jed D. Whittaker, Raymond W. Simmonds

Abstract

We have produced high quality resonant microwave circuits through developing a vacuum-gap technology for fabricating lumped-element capacitive and inductive components. We use micromachining to eliminate amorphous dielectric materials leaving vacuum in regions of strong electric and magnetic fields. Vacuum-gap capacitors from 0.1 pF to 100 pF are relatively small in size and show ideal behavior. Vacuum-bridge crossovers are robust, up to 10 micrometers long, and 200 nm high. Resonant circuits at 50 mK reveal single modes and high internal quality factors (30,000<Q<165,000), outperforming dielectric-filled devices. Using these components, we demonstrate frequency-division multiplexing as well as superconducting phase qubit operation.

Citation

Applied Physics Letters

Volume

96

Issue

9

Pub Type

Journals

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Citation

Cicak, K. , Li, D. , Strong, J. , Allman, M. , Altomare, F. , Sirois, A. , Whittaker, J. and Simmonds, R. (2010), Low-loss superconducting resonant circuits using vacuum-gap -based microwave components, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904138 (Accessed October 14, 2025)