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Large Area, Ultra-high Voltage 4H-SiC PiN Rectifiers



Ranbir Singh, Kenneth G. Irvine, D C. Capell, James Richmond, David W. Berning, Allen R. Hefner Jr., John W. Palmour


This paper reports the design, fabrication, and high temperature characteristics of 1 mm2, 4 mm2, and 9 mm2 4H-SiC rectifiers with 6 kV, 5 kV, and 10 kV blocking voltage respectively. These results were obtained from two lots in an effort to increase the total power levels on such rectifiers. An innovative design utilizing a highly doped p-type epitaxial Anode layer and junction termination extension (JTE) were used in order to realize good on-state as well as stable blocking characteristics. For the 1 mm2 and 4 mm2 rectifier, a forward voltage drop of less than 5 V was observed at 500 A/cm2 in the 25 0C to 225 0C temperature range, and the peak reverse recovery current shows a modest 50% increase. On the 10 kV, 9 mm2 rectifier, a forward voltage drop of less than 4.8 V was observed at 100 A/cm2 in the entire 25 0C to 200 0C temperature range. For this device, the reverse recovery characteristics show a modest 110% increase in the peak reverse recovery current from 25 0C to 200 0C. A dramatically low Qrr of 3.8 uC was obtained at a forward current density of 220 A/cm2 at 200 0C for this ultra high voltage rectifier. These devices show that more than four orders of magnitude reduction in reverse recovery charge is obtained in 4H-SiC rectifiers as compared to comparably rated Si rectifiers.
IEEE Transactions on Electron Devices


PiN, rectifier, SiC


Singh, R. , Irvine, K. , Capell, D. , Richmond, J. , Berning, D. , Hefner Jr., A. and Palmour, J. (2002), Large Area, Ultra-high Voltage 4H-SiC PiN Rectifiers, IEEE Transactions on Electron Devices, [online], (Accessed April 22, 2024)
Created November 30, 2002, Updated October 12, 2021