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ITS 90 Calibration of Radiometers Using Wire/Thin-Film Thermocuples in the NIST RTP Tool: Effective Emissivity Modeling

Published

Author(s)

Benjamin K. Tsai, D P. DeWitt

Abstract

Models were developed to estimate the wafer effective emissivity as a function of the optical properties and geometrical configuration of the wafer and chamber in the NIST Rapid Thermal Processing (RTP) tool. These estimates were used to determine wafer temperatures from observed spectral radiance temperatures obtained with a light-pipe radiation thermometer (LPRT) calibrated on the international Temperature Scale of 1990 (ITS-90) against a blackbody. Out of the total uncertainty of 3.5 {degrees} C for the LPRT temperature measurements, the uncertainty component due to the effective emissivity uncertainty contributed about 2.0 {degrees} C. (In this paper all uncertainties are reported with a coverage factor of k=1.) The model-corrected LPRT temperature measurements were in agreement with measurements using the new NIST combination wire/thin-film thermocouples (TC) calibrated against the ITS-90 with an uncertainty of less than 0.4 {degrees} C for the wafer temperature range 700 {degrees} C to 900 {degrees} C.
Proceedings Title
Proceedings of the 7th International Conference on Advanced Thermal Processing of Semiconductors (RTP '99)
Conference Dates
September 8-10, 1999
Conference Title
International Conference on Advanced Thermal Processing of Semiconductors

Keywords

analytical model, effective emissivity, international temperature scale of 1990, light-pipe radiation thermometer, rapid thermal processing, silicon wafer, spectral radiance temperature, uncertainty

Citation

Tsai, B. and DeWitt, D. (1999), ITS 90 Calibration of Radiometers Using Wire/Thin-Film Thermocuples in the NIST RTP Tool: Effective Emissivity Modeling, Proceedings of the 7th International Conference on Advanced Thermal Processing of Semiconductors (RTP '99), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841982 (Accessed April 17, 2024)
Created September 8, 1999, Updated February 17, 2017