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Invited Article: Tuning and stabilization of optomechanical crystal cavities through NEMS integration



Karen E. Grutter, Marcelo I. Davanco, Krishna Balram, Kartik Srinivasan


Nanobeam optomechanical crystals, in which localized GHz frequency mechanical modes are coupled to wavelength-scale optical modes, are being employed in a variety of experiments across different material platforms. Here, we demonstrate the electrostatic tuning and stabilization of such devices, by integrating a Si3N4 slotmode optomechanical crystal cavity with a nanoelectromechanical systems (NEMS) element, which controls the displacement of an additional 'tuning' beam within the optical near- eld of the optomechanical cavity. Under DC operation, tuning of the optical cavity wavelength across several optical linewidths without degradation of the optical quality factor (Q 10^5) is observed. The AC response of the tuning mechanism is measured, revealing actuator resonance frequencies in the 10 MHz to 20 MHz range, consistent with the predictions from simulations. Feedback control of the optical mode resonance frequency is demonstrated, and alternative actuator geometries are presented.
APL Photonics


Grutter, K. , Davanco, M. , Balram, K. and Srinivasan, K. (2018), Invited Article: Tuning and stabilization of optomechanical crystal cavities through NEMS integration, APL Photonics, [online],, (Accessed June 13, 2024)


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Created July 30, 2018, Updated October 12, 2021