Invited Article: Tuning and stabilization of optomechanical crystal cavities through NEMS integration

Published

July 31, 2018

Author(s)

Karen E. Grutter, Marcelo I. Davanco, Krishna Balram, Kartik Srinivasan

Abstract

Nanobeam optomechanical crystals, in which localized GHz frequency mechanical modes are coupled to wavelength-scale optical modes, are being employed in a variety of experiments across different material platforms. Here, we demonstrate the electrostatic tuning and stabilization of such devices, by integrating a Si3N4 slotmode optomechanical crystal cavity with a nanoelectromechanical systems (NEMS) element, which controls the displacement of an additional 'tuning' beam within the optical near- eld of the optomechanical cavity. Under DC operation, tuning of the optical cavity wavelength across several optical linewidths without degradation of the optical quality factor (Q 10^5) is observed. The AC response of the tuning mechanism is measured, revealing actuator resonance frequencies in the 10 MHz to 20 MHz range, consistent with the predictions from simulations. Feedback control of the optical mode resonance frequency is demonstrated, and alternative actuator geometries are presented.

Citation

APL Photonics

Volume

3

Issue

10

Pub Type

Journals

Download Paper

https://doi.org/10.1063/1.5042225

Local Download

Citation

Grutter, K. , Davanco, M. , Balram, K. and Srinivasan, K. (2018), Invited Article: Tuning and stabilization of optomechanical crystal cavities through NEMS integration, APL Photonics, [online], https://doi.org/10.1063/1.5042225, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925906 (Accessed October 10, 2025)