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PUBLICATIONS

Introduction to Surface Finish Metrology

Published

Author(s)

Theodore V. Vorburger

Abstract

We discuss the range of methods available to measure surface finish and emphasize the methods of stylus profiling and various types of optical profiling. Documentary standards for measurement of surface texture and comparisons between methods are also discussed.
Proceedings Title
Optical Fabrication and Testing (OF&T) Topical Meeting
Conference Dates
June 13-16, 2010
Conference Location
Jackson Hole, WY
Pub Type
Conferences

Keywords

surface finish, roughness, texture, topography, stylus, phase shifting, coherence scanning, confocal
Dimensional metrology

Citation

Vorburger, T. (2010), Introduction to Surface Finish Metrology, Optical Fabrication and Testing (OF&T) Topical Meeting, Jackson Hole, WY (Accessed December 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 14, 2010, Updated February 19, 2017