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Integration of Nanostructured Materials With MEMS Microhotplate Platforms to Enhance Chemical Sensor Performance



Kurt D. Benkstein, C Martinez, Guofeng Li, Douglas C. Meier, Christopher B. Montgomery, Stephen Semancik


The development of small sensors (low mass, small size and low power budgets) has been an increasingly active area of research for multiple applications, including industrial process monitoring, building security and extraterrestrial exploration. Nanostructured materials have also been showing promise in recent years as chemical sensor materials, owing to several benefits of the materials such as high surface area, workability and increasing synthetic accessibility. Our interest is the integration of these novel materials onto MEMS microhotplate platforms developed at the National Institute of Standards and Technology to gain the benefits of both the materials and the platforms for high-performance chemical sensor arrays. Here, we describe our success in overcoming the challenges of integration and the benefits that we have achieved with regard to the critical sensor performance characteristics of sensitivity, speed, stability and selectivity.
Journal of Nanoparticle Research


chemical sensors, conducting polymers, MEMS, metal oxides, nanoparticles


Benkstein, K. , Martinez, C. , Li, G. , Meier, D. , Montgomery, C. and Semancik, S. (2006), Integration of Nanostructured Materials With MEMS Microhotplate Platforms to Enhance Chemical Sensor Performance, Journal of Nanoparticle Research (Accessed July 14, 2024)


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Created December 1, 2006, Updated February 17, 2017