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Information Transfer Capability and Signal Processing Performance of Modern Scanning Electron Microscopes

Published

Author(s)

Zsolt Radi, Andras Vladar, Michael T. Postek

Abstract

The scanning electron microscope (SEM) produces images with signals generated through the interaction of the primary electrons and the sample material. The proper choice of electron beam forming and imaging parameters is essential to collect relevant information. Incorrect or insufficient information leads to loss of control over the monitored phenomena. Acquisition of too much or unnecessary data results in decreased measurement speed and higher cost of operation. There are three major subsystems defining the measurement and information processing performance in the SEM. These are the electron optical column (including the electron gun and beam scanning system), the sample stage, and the signal electronics. All these must work sufficiently well to achieve the best performance.
Citation
Microscopy and Microanalysis
Volume
9
Issue
(Suppl 2)

Keywords

information collecting capability, information transfer capability, scanning electron microscope (SEM), signal chain, signal processing performance

Citation

Radi, Z. , Vladar, A. and Postek, M. (2003), Information Transfer Capability and Signal Processing Performance of Modern Scanning Electron Microscopes, Microscopy and Microanalysis (Accessed April 18, 2024)
Created January 1, 2003, Updated February 19, 2017