Influence of Particle Oxide Coating on Light Scattering by Submicron Metal Particles on Silicon Wafers
Jae H. Kim, S H. Ehrman, Thomas Germer
We report the effect that room temperature oxidation has on the scattering of 633 nm light by copper particles deposited on a silicon wafer. The results provide a validation for a theory of light scattering by coated particles on a substrate and establish the lifetime of these particles as light scattering standards to be on the order of a few months. The results also suggest that the room temperature oxidation of copper particles proceeds in a continuous manner, rather than approaching an asymptotic thickness as found by Cabrera and Mott [Rep. Prog. Phys. 12, 163 (1948)] on copper films.