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Improving Data Quality in Embedded Sensor Systems for APC

Published

Author(s)

Julien M. Amelot, YaShian Li-Baboud

Abstract

Achieving next-generation factory (NGF) goals has been an industry challenge for APC applications to acquire a sufficient level of data quality to maximize the benefits of automation. For example, it is difficult to get accurate timestamps because sensor data might not be immediately processed. Another common problem is unreliable data sampling rates which can have jitters. This presentation focuses on the improvement of data quality in an embedded sensor system, to achieve a reliable data acquisition chain at high sampling rates. To study the data flow and the time-stamping issues, we built the Sensor Network Testbed (SNT), that face similar data quality problems seen in the semiconductor factories. The goal is to build a system able to accurately detect, filter, characterize and analyze specific events, to research best practices that ensure reliable data quality for APC. At the minimum, the objective is to meet the near term data quality requirements for semiconductor manufacturing, which are on the order of milliseconds for data sampling and timestamping.
Proceedings Title
AEC/APC Symposium
Conference Dates
September 28-30, 2009
Conference Location
Ann Arbor, MI

Keywords

data quality, sensor network, embedded systems, advanced process control

Citation

Amelot, J. and Li-Baboud, Y. (2009), Improving Data Quality in Embedded Sensor Systems for APC, AEC/APC Symposium, Ann Arbor, MI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903569 (Accessed March 3, 2024)
Created September 28, 2009, Updated February 19, 2017