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Force-deflection characterization of individual carbon nanotubes attached to MEMS devices



M Hartman, Paul Rice, Dudley Finch, G. D. Skidmore, Victor M. Bright


Results are presented for in-situ manipulation, attachment, and mechanical testing of individual carbon nanotubes (CNTs) on MEMS devices. Nanotubes positioned onto polysilicon structures were permanently attached by electron beam deposition (EBD) "welding". This approach allows design of mechanical tests for nanotubes with commercially available MEMS processes. A tensile force of 2.4 +1- 0.2 mN was applied to the structure via an attached, individual CNT, producing device deflections measured in a scanning electron microscope. Based on atomic force microscopy of welds, the joint between the EBD material and MEMS surface supported a shear stress of 1.6 +1- 0.5 MPa. on measuring force-deflection curves for individual CNTs mounted on MEMS platforms. Nanotubes previously prepared on glass slides have been manipulated to the desired device site, permanently attached, pulled, and the resulting device deflections measured.
Proceedings Title
MEMS Tech. Dig.
Conference Dates
January 25-29, 2004
Conference Location
Maastricht, NL
Conference Title
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference (MEMS)


carbon nanotubes, electron beam welding, mechanical properties, MEMS


Hartman, M. , Rice, P. , Finch, D. , Skidmore, G. and Bright, V. (2004), Force-deflection characterization of individual carbon nanotubes attached to MEMS devices, MEMS Tech. Dig., Maastricht, NL, [online],, (Accessed April 19, 2024)
Created January 24, 2004, Updated October 12, 2021