Feedback control of a nonlinear electrostatic force transducer
Ivan Ryger, Stefan Chamraz, Richard Balogh, Alexandra B. Artusio-Glimpse, Michelle S. Stephens, John H. Lehman, Paul A. Williams
In this article, we document a design process for a feedback controller for a nonlinear electrostatic transducer that exhibits a strong unloaded resonance. This is being used for precision optical power measurement by means of a photon force measurement. Effects like non- linear force-to-deflection transfer, change in spring-constant stiffness shift of resonance frequency are investigated. To stabilize the electro-mechanical system, an active disturbance- rejecting state-feedback controller with non-linear force mapping is employed. Stability of a closed feedback loop state controller in frequency domain is investigated. The functionality of a proposed concept was being simulated and its response is being analyzed. Properties and benefits of the feedback control are discussed.
IEEE Transactions on Control Systems Technology
single-sided capacitive sensor, nonlinear control, active disturbance rejection controller, delay synchronization, discrete time domain, stability, numerical simulation
, Chamraz, S.
, Balogh, R.
, Artusio-Glimpse, A.
, Stephens, M.
, Lehman, J.
and Williams, P.
Feedback control of a nonlinear electrostatic force transducer, IEEE Transactions on Control Systems Technology
(Accessed December 10, 2023)