Feedback control of a nonlinear electrostatic force transducer

Author(s)

Ivan Ryger, Stefan Chamraz, Richard Balogh, Alexandra B. Artusio-Glimpse, Michelle S. Stephens, John H. Lehman, Paul A. Williams

Abstract

In this article, we document a design process for a feedback controller for a nonlinear electrostatic transducer that exhibits a strong unloaded resonance. This is being used for precision optical power measurement by means of a photon force measurement. Effects like non- linear force-to-deflection transfer, change in spring-constant stiffness shift of resonance frequency are investigated. To stabilize the electro-mechanical system, an active disturbance- rejecting state-feedback controller with non-linear force mapping is employed. Stability of a closed feedback loop state controller in frequency domain is investigated. The functionality of a proposed concept was being simulated and its response is being analyzed. Properties and benefits of the feedback control are discussed.

Citation

IEEE Transactions on Control Systems Technology

Pub Type

Journals

Keywords

single-sided capacitive sensor, nonlinear control, active disturbance rejection controller, delay synchronization, discrete time domain, stability, numerical simulation

Citation

Ryger, I. , Chamraz, S. , Balogh, R. , Artusio-Glimpse, A. , Stephens, M. , Lehman, J. and Williams, P. (1970), Feedback control of a nonlinear electrostatic force transducer, IEEE Transactions on Control Systems Technology (Accessed October 11, 2025)