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Face-Centered Cubic Titanium: An Artifact in Titanium/Aluminum Multilayers



John E. Bonevich, D van Heerden, Daniel Josell


The present investigation is the first comprehensive comparative study of x-ray diffraction (XRD) and transmission electron microscopy (TEM) results to address the important issue of fcc Ti formation in nanoscale multilayers Ti/Al multilayers with 7.2 and 5.2 nm composition modulation wavelengths were studied by reflection and transmission XRD as well as transmission electron diffraction (ED), high-resolution TEM, and energy-filtered TEM. Previous reports have claimed deposition of fcc Ti in multilayer systems. Our results demonstrate that the Ti in Ti/Al multilayers deposits in the hcp form and that fcc Ti is merely an artifact of producing specimens for cross-sectional TEM.
Journal of Materials Research
No. 5


aluminum, multilayer, thin film, titanium, transformation, transmission electron microscopy, x-ray diffraction


Bonevich, J. , van, D. and Josell, D. (1999), Face-Centered Cubic Titanium: An Artifact in Titanium/Aluminum Multilayers, Journal of Materials Research (Accessed February 28, 2024)
Created May 1, 1999, Updated February 17, 2017