Fab-wide Network Time Synchronization - Simulation and Analysis

Published

September 28, 2007

Author(s)

Naveen Kalappa, Vinod Anandarajah, Julien L. Baboud, Ya-Shian Li-Baboud, James Moyne

Abstract

In today?s fabs, coordination of time-based information throughout the factory and enterprise has become necessary. This has driven the need to have time synchronization at all levels of the enterprise. Time synchronization protocols such as Network Time Protocol (NTP) and Precision Time Protocol (PTP) have been defined for performing synchronization over distributed systems. Lack of time synchronization among the various subsystems is seen as a cause for poor data quality in Interface A and Advanced Process Control (APC) analysis. The focus of our study is to investigate the extent and precision of time synchronization that can be practically applied with the available protocols at various levels of the semiconductor factory environment to meet next generation manufacturing requirements. To this end, we describe the objectives and details of the simulator that aims to model a semiconductor factory network providing a practical perspective to study the benefits and potential network factors contributing to accuracy degradation of factory-wide time synchronization.

Proceedings Title

AEC/APC Symposium

Conference Dates

September 17-19, 2007

Conference Location

Palm Springs, CA, USA

Conference Title

AEC/APC Symposium XIX

Pub Type

Conferences

Download Paper

Local Download

Keywords

Advanced Process Control, Equipment Data Acquisition, NTP, time synchronization

Citation

Kalappa, N. , Anandarajah, V. , Baboud, J. , Li-Baboud, Y. and Moyne, J. (2007), Fab-wide Network Time Synchronization - Simulation and Analysis, AEC/APC Symposium, Palm Springs, CA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32771 (Accessed October 15, 2024)