Josell, D.
, Moffat, T.
and Wheeler, D.
(2004),
An Exact, Algebraic Solution for the Incubation Period of Superfill, Journal of the Electrochemical Society, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853248
(Accessed April 23, 2024)
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An Exact, Algebraic Solution for the Incubation Period of Superfill
Published
Author(s)
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Abstract
Recent publications have used the impact of area change coupled with conservation of adsorbed catalyst to quantify the superfill effect of bottom-up feature filling during electrodeposition and chemical vapor deposition. This work describes how that superfilling process can be quantified using fronts that grow from corners where surfaces impinge. The results obtained apply only when catalyst is preadsorbed on the surface, with no subsequent accumulation of consumption. They are therefore of limited use for general process modeling. However, because they are exact solution, they can be used to check the accuracy of models and computer codes concerned with the more general problems of feature filling.Citation
Journal of the Electrochemical Society
Volume
151
Issue
No. 1
Pub Type
Journals
Download Paper
Keywords
incubation, superconformal, superfill
Citation
Created December 31, 2003, Updated October 12, 2021