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Energy Dispersive Spectrometry

Published

Author(s)

Dale E. Newbury

Abstract

Energy dispersive x-ray spectrometry (EDS) is a spectral measurement tool used with a wide variety of excitation sources: electrons, ions and x-ray. Photon measurement is based on photoelectric absorption and conversion into charge. The process is serial in time, but parallel n energy over the range from 100 eV to 25 keV (Si) and 100 keV (Ge). The major artifacts include peak broadening by a factor of 75 over natural linewidths and parasitic escape and coincidence peaks. Qualitative elemental analysis proceeds by identification of families of x-ray lines. Quantitative analysis with electron-excitation is based upon measurement of reference standards (pure elements, binary compounds) and matrix correction factors for electron scattering and x-ray absorption and fluorescence effects. Quality assurance for EDS is based upon monitoring and control of calibration and detector efficiency.
Citation
Methods in Materials Research

Keywords

EDS, electron probe microanalysis, energy dispersive x-ray spectrometry, qualitative analysis, quantitative analysis, scanning electron microscopy, x-ray spectrometry

Citation

Newbury, D. (2008), Energy Dispersive Spectrometry, Methods in Materials Research (Accessed April 15, 2024)
Created October 16, 2008