Energy dispersive x-ray spectrometry (EDS) is a spectral measurement tool used with a wide variety of excitation sources: electrons, ions and x-ray. Photon measurement is based on photoelectric absorption and conversion into charge. The process is serial in time, but parallel n energy over the range from 100 eV to 25 keV (Si) and 100 keV (Ge). The major artifacts include peak broadening by a factor of 75 over natural linewidths and parasitic escape and coincidence peaks. Qualitative elemental analysis proceeds by identification of families of x-ray lines. Quantitative analysis with electron-excitation is based upon measurement of reference standards (pure elements, binary compounds) and matrix correction factors for electron scattering and x-ray absorption and fluorescence effects. Quality assurance for EDS is based upon monitoring and control of calibration and detector efficiency.
Methods in Materials Research
EDS, electron probe microanalysis, energy dispersive x-ray spectrometry, qualitative analysis, quantitative analysis, scanning electron microscopy, x-ray spectrometry
Energy Dispersive Spectrometry, Methods in Materials Research
(Accessed June 5, 2023)