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Electron-Impact Total Ionization Cross Sections of SFx (x = 1-5)



M A. Ali, Karl Irikura, Yong Sik Kim


Total cross sections for electron impact ionization are necessary quantities for numerical modeling of plasma chemistry and for quantitative mass-spectrometric gas analysis. Theoretical cross sections for SF, SF2, SF3, SF4, and SF5 are calculated by the recently developed binary-encounter- Bethe (BEB) model. The BEB model combines a modified form of the Mott cross section and the Bethe cross section. The results are compared with experimental cross sections for SF3 and SF5 free radicals. In view of the success of the BEB method for SF6 and many other molecules, it is expected that the results presented here will provide reliable total ionization cross sections for SFx, x = 1-5.
International Journal of Mass Spectrometry
No. 1-3


cross section, electron impact, ionization, mass spectrometry, plasma modeling, theory


Ali, M. , Irikura, K. and Kim, Y. (2000), Electron-Impact Total Ionization Cross Sections of SF<sub>x</sub> (x = 1-5), International Journal of Mass Spectrometry (Accessed April 20, 2024)
Created June 30, 2000, Updated October 12, 2021