Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Electron-Impact Total Ionization Cross Sections of CF4, C2F6, and C3F8



H Nishimura, W M. Huo, M A. Ali, Yong Sik Kim


Both theoretical and experimental electron-impact total ionization cross sections of CF4, C2F6, and C3F8 are presented. The experimental cross sections have been measured as a function of incident electron energy T from threshold to 3 keV. A parallel plate condenser type appartus was used. The molecular polarizability for C3F8 was empirically estimated to be α = 10.6 angstrom}3 + 0.8 angstrom}3. Theoretical cross sections calculated from the binary-encounter-Bethe BEB} method, which combines a modified form of the Mott cross section and the Bethe cross section, are compared with the experimental crosws sections. The BEB cross sections calculated from correlated molecular wave functions with theoretical estimates for multiplee ionization are about 10% higher than the experimental data at peak for CF4, while they are in excellent agreement with the experimental data for C2F6 and C3F8. Our analysis shows that the BEB theory implicitly includes part of neutral dissociation, such as CF4->CF3+F, and hence tends to be an upper limit to the total ionization cross section. We found that the difference between our best theory for CF4 and the present experimental cross section exhibits a remarkable similarity to the shape of the recently measured cross section for neutral dissociation, through there is no a priori reason for the similarity. Owing to the large number of bound electrons, the correlation included in our wave functions for 2F6 and the large number of bound electrons, the correlation included in our wave functions for C2F6andd C3F8 is more limited than for CF4. Hence, we believe that for these two molecules the calculated cross sections are lower than the true BEB values, in spite of the apparent excellent agreement between the theory and the experiment.
Journal of Chemical Physics
No. 8


electron-impact total ionization


Nishimura, H. , Huo, W. , Ali, M. and Kim, Y. (1999), Electron-Impact Total Ionization Cross Sections of CF<sub>4</sub>, C<sub>2</sub>F<sub>6</sub>, and C<sub>3</sub>F<sub>8</sub>, Journal of Chemical Physics (Accessed June 3, 2023)
Created January 31, 1999, Updated October 12, 2021