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Electron Backscatter Diffraction Investigation of a Nano-Crystalline Pt Thin Film



T Maitland, X Han, Mark D. Vaudin, G R. Fox, M Coy


A polycrystalline Pt thin film deposited on a <100> cut Si single crystal wafer coated with SiO2 and a TiO2 adhesion layer was studied using automated electron backscatter diffraction (EBSD). Integration of the EBSD detector and a scanning electron microscope (SEM) equipped with a field emission gun (FEG) provided for an EBSD spatial resolution of 10nm to 20nm. The crystallographic textures of the Pt thin film grains were mapped and correlated with the grain size distribution. Plan-view secondary electron images confirmed that the film consisted of grains with equiaxed lateral dimensions. The average grain size determined from band contrast images was 34.6 nm with a standard deviation of 16.7 nm. Both inverse pole figures and Euler maps revealed a strong fiber texture with the Pt<111> parallel to the substrate normal direction. The high resolution capability of the EBSD and SEM equipment not only allowed local quantification of the <111> fiber texture, but also revealed the correlation of in-plane grain orientations on a local scale and the occurence of isolated 10 nm grains significantly misoriented from the matrix of 111} textured grains.


EBSD, high resolution, microstructure, microtexture, Pt thin film


Maitland, T. , Han, X. , Vaudin, M. , Fox, G. and Coy, M. (2021), Electron Backscatter Diffraction Investigation of a Nano-Crystalline Pt Thin Film, Ultramicroscopy (Accessed May 21, 2024)


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Created October 12, 2021