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Electrochemical Micromachining of Hastelloy B-2 with Ultrashort Voltage Pulses

Published

Author(s)

Gordon A. Shaw, Joseph J. Maurer, Steven E. Fick, Thomas P. Moffat, J. J. Mallett, John L. Hudson

Abstract

Electrochemical micromachining (ECMM) with ultrashort voltage pulses, a maskless all-electrochemical micro and nanofabrication technique, has been used to fabricate microstructures on a corrosion resistant nickel-based superalloy, Hastelloy B-2. Because of its work hardening behavior, this Ni-Mo alloy is difficult to machine on the macroscale, and this work presents a viable, strain-free micromachining strategy for this technologically important material. ECMM was used to machine microstructures to depths of 3 μm and 10 μm and the resolution of the machining was found to be dependent on the duration of the nanoscale pulses. Microstructures were also machined to 100 μm depths demonstrating the potential for the fabrication of high aspect ratio features using this technique. The ECMM was performed utilizing an experimental apparatus consisting of standard electrochemical equipment combined with a custom electrical circuit that was constructed easily and at low cost.
Citation
Electrochimica Acta
Volume
55
Issue
3

Keywords

Micromachining, Hastelloy, Etching, Microstructures, Ultrashort

Citation

Shaw, G. , Maurer, J. , Fick, S. , Moffat, T. , Mallett, J. and Hudson, J. (2009), Electrochemical Micromachining of Hastelloy B-2 with Ultrashort Voltage Pulses, Electrochimica Acta, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901052 (Accessed August 1, 2021)
Created September 8, 2009, Updated February 19, 2017