Effect of Different Electron Elastic-Scattering Cross Sections on Inelastic Mean Free Paths Obtained from Elastic-Backscattering Experiments
Aleksander Jablonski, Francesc Salvat, Cedric J. Powell
Inelastic mean free paths (IMFPs) of electrons with energies between 100 eV and 5,000 eV have been frequently obtained from measurements of elastic-backscattering probabilities for different specimen materials. A calculation of these probabilities is also required to determine IMFPs. We report calculations of elastic-backscattering probabilities for gold at energies of 100 eV and 500 eV with differential elastic-scattering cross sections obtained from the Thomas-Fermi-Dirac potential and the more reliable Dirac-Hartree-Fock potential. For two representative experimental configurations, the average deviation between IMFPs obtained with cross sections from the two potentials was 11.4 %.
elastic-backscattering probabilities, electron elastic-scattering cross sectio, electron inelastic mean free paths, gold, surface analysis
, Salvat, F.
and Powell, C.
Effect of Different Electron Elastic-Scattering Cross Sections on Inelastic Mean Free Paths Obtained from Elastic-Backscattering Experiments, Microchimica Acta
(Accessed May 28, 2023)