Effect of Backscattered Electrons on the Analysis Area in Scanning Auger Microscopy

Published

May 1, 2004

Author(s)

Cedric J. Powell

Abstract

A simple analytical model has been used to determine the effects of backscattered electrons on the analysis area in scanning Auger microscopy. For normally incident electrons, the radius r_a of the analysis area is calculated corresponding to detection of 80 %, 90 %, and 95 % of the total Auger-electron signal as a function of two sample parameters, the backscattering factor R and the Gaussian parameter ς_b describing the radial distribution of the backscattered electrons. For a reasonable range of these parameters, r_a depends linearly on ς_b and to a lesser extent on R. Values of ra can also be appreciably larger, by more than a factor of 100, than the widths of the incident beam in modern instruments, and need to be considered in quantitative analyses of particles and inclusions. Monte Carlo calculations are needed for more realistic evaluations of the analysis area and to determine this area for non-normal incidence of the electron beam.

Citation

Applied Surface Science

Volume

230

Issue

No. 1-4

Pub Type

Journals

Keywords

analysis area, Auger-electron microscopy, backscattered electrons, scanning Auger microscopy, surface analysis

Citation

Powell, C. (2004), Effect of Backscattered Electrons on the Analysis Area in Scanning Auger Microscopy, Applied Surface Science (Accessed April 26, 2026)

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