Kim, Y.
, Seung Ho, Y.
, Yang, K.
and Dagalakis, N.
(2015),
Design of MEMS vision tracking system based on a micro fiducial marker, Journal of Sensors and Actuators Networks, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919160
(Accessed April 24, 2024)
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Design of MEMS vision tracking system based on a micro fiducial marker
Published
Author(s)
, Yang Seung Ho, KwangWoong Yang,
Abstract
In this study, a MEMS-based vision tracking system is developed based on micro fiducial markers. The vision tracking system recognizes the predetermined patterns of the micro-scale fiducial markers and calculates the position and rotation of the MEMS elements. Due to its good accessibility, the presented system can be applied to MEMS devices without significant effort or modification. In this study, this tracking system and three micro vision markers are applied to a MEMS nanopositioner as a linear displacement sensor. With this system, it is possible to monitor the linear displacement of the nanopositioner with the error less than 1% of an intended motion and the jittering error less than 1 µm. The presented MEMS vision tracking system also demonstrated its capabilities to track multiple MEMS elements simultaneously in MEMS-based micro-manipulation.Citation
Journal of Sensors and Actuators Networks
Pub Type
Journals
Download Paper
Keywords
MEMS, micro-manipulation, computer vision, OpenCV, micro-gripper, vision marker, vision tracking
Citation
Created August 30, 2015, Updated October 12, 2021