Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Correlation of Microwave Dielectric Properties and Microstructure of Unpatterned Ferroelectric Thin Films



Richard G. Geyer, Melanie W. Cole, P. C. Joshi, E. Ngo, C. Hubbard, W. Nothwang, M. Bratcher, M. Ervin, M. Wood


The influence of low concentration (1 mol%) Mg doping on the structural, microstructural, surface morphological and dielectric properties of Ba1-xSrxTiOd3^ thin films has been measured and analyzed. The films were fabricated on MgO and Pt-Si substrates via the metalorganic solution deposition technique using carboxylate-alkoxide precursors and post deposition annealed at 800 oC (film/MgO substrates) and 750 oC (film/Pt-Si substrates). The structure, microstructure, surface morphology and film/substrate compositional quality were analyzed and correlated to the films dielectric and insulating properties. Dielectric properties of unpatterned films were measured at 10 GHz with a coupled/split dielectric resonator system and at 100 kHz using metal-insulator-metal capacitors. The Mg-doped BST films exhibited improved dielectric loss and insulating characteristics compared to the undoped Ba0.6Sr0.4TiO3 thin films. The improved dielectric properties, low leakage current, and good tunability of the low level Mg-doped BST think films merit strong potential for utilization in microwave tunable devices.
Conference Dates
April 1-5, 2002
Conference Location
San Francisco, CA, USA
Conference Title
Materials Research Society Symposium


microwave dielectric properties, unpatterned, Acceptor-doped barium strontium titanate films


Geyer, R. , Cole, M. , Joshi, P. , Ngo, E. , Hubbard, C. , Nothwang, W. , Bratcher, M. , Ervin, M. and Wood, M. (2002), Correlation of Microwave Dielectric Properties and Microstructure of Unpatterned Ferroelectric Thin Films, Materials Research Society Symposium, San Francisco, CA, USA (Accessed April 16, 2024)
Created July 31, 2002, Updated October 12, 2021