Composition Standards for AlGaAs Epitaxial Layers

Published

April 1, 2006

Author(s)

Kristine A. Bertness, Todd E. Harvey, C. M. Wang, Albert J. Paul, Larry Robins

Abstract

Standard Reference Materials (SRMs) 2840 to 2843 are semiconductor material artifacts that consist of an epitaxial layer of AlxGa(1-x)As on a GaAs substrate. From the energy at the peak intensity in the photoluminescence (PL) spectrum, the composition of the film is determined to an expanded uncertainty of < 0.002. The recommended storage conditions to minimize oxidation and hydrocarbon contamination are given. Suggestions for use as comparison standards are made for specific analysis methods, including PL, electron microprobe analysis (EMPA), x-ray photoelectron spectroscopy (XPS), and Auger electron spectroscopy (AES). Because of variability in substrate lattice parameters, these films cannot be used as an absolute standard for composition determination solely from the angular separation of peaks in x-ray diffraction rocking curves. Further studies on other x-ray diffraction methodologies are underway.

Citation

Special Publication (NIST SP) - 260-163

Report Number

260-163

NIST Pub Series

Special Publication (NIST SP)

Pub Type

NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.SP.260-163

Local Download

Keywords

AlGaAs, aluminum gallium arsenide, epitaxial films, photoluminescence, semiconductor composition

Citation

Bertness, K. , Harvey, T. , Wang, C. , Paul, A. and Robins, L. (2006), Composition Standards for AlGaAs Epitaxial Layers, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-163, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32107 (Accessed October 11, 2025)