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Composition Standards for AlGaAs Epitaxial Layers



Kristine A. Bertness, Todd E. Harvey, C. M. Wang, Albert J. Paul, Larry Robins


Standard Reference Materials (SRMs) 2840 to 2843 are semiconductor material artifacts that consist of an epitaxial layer of AlxGa(1-x)As on a GaAs substrate. From the energy at the peak intensity in the photoluminescence (PL) spectrum, the composition of the film is determined to an expanded uncertainty of < 0.002. The recommended storage conditions to minimize oxidation and hydrocarbon contamination are given. Suggestions for use as comparison standards are made for specific analysis methods, including PL, electron microprobe analysis (EMPA), x-ray photoelectron spectroscopy (XPS), and Auger electron spectroscopy (AES). Because of variability in substrate lattice parameters, these films cannot be used as an absolute standard for composition determination solely from the angular separation of peaks in x-ray diffraction rocking curves. Further studies on other x-ray diffraction methodologies are underway.
Special Publication (NIST SP) - 260-163
Report Number


AlGaAs, aluminum gallium arsenide, epitaxial films, photoluminescence, semiconductor composition


Bertness, K. , Harvey, T. , Wang, C. , Paul, A. and Robins, L. (2006), Composition Standards for AlGaAs Epitaxial Layers, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online],, (Accessed July 19, 2024)


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Created March 31, 2006, Updated October 15, 2021