Compensation for Geometrical Variations in Coplanar Waveguide Probe-Tip Calibration

Published

April 1, 1997

Author(s)

Dave K. Walker, Dylan F. Williams

Abstract

We show how coplanar-waveguide probe-tip scattering parameter calibrations performed in one coplanar waveguide conductor geometry may be adjusted for measurement in another. The method models the difference between the two probe-tip-to-coplanar-waveguide transitions as a change in shunt capacitance and applies previously developed techniques for its determination and compensation. Comparison to accurate multiline Thro-Reflect-Line calibrations verifies the accuracy of the method. Differences in both conductor geometry and substrate permittivity are considered in the comparison. The method requires only a single, compact open stub or thru line fabricated on the measurement wafer.

Citation

IEEE Microwave and Guided Wave Letters

Volume

7

Issue

4

Pub Type

Journals

Download Paper

https://doi.org/10.1109/75.563631

Keywords

Automatic network analyzers, coplanar wave-guide, on-wafer calibration

Citation

Walker, D. and Williams, D. (1997), Compensation for Geometrical Variations in Coplanar Waveguide Probe-Tip Calibration, IEEE Microwave and Guided Wave Letters, [online], https://doi.org/10.1109/75.563631 (Accessed October 10, 2025)