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Compensation for Geometrical Variations in Coplanar Waveguide Probe-Tip Calibration



Dave K. Walker, Dylan F. Williams


We show how coplanar-waveguide probe-tip scattering parameter calibrations performed in one coplanar waveguide conductor geometry may be adjusted for measurement in another. The method models the difference between the two probe-tip-to-coplanar-waveguide transitions as a change in shunt capacitance and applies previously developed techniques for its determination and compensation. Comparison to accurate multiline Thro-Reflect-Line calibrations verifies the accuracy of the method. Differences in both conductor geometry and substrate permittivity are considered in the comparison. The method requires only a single, compact open stub or thru line fabricated on the measurement wafer.
IEEE Microwave and Guided Wave Letters


Automatic network analyzers, coplanar wave-guide, on-wafer calibration


Walker, D. and Williams, D. (1997), Compensation for Geometrical Variations in Coplanar Waveguide Probe-Tip Calibration, IEEE Microwave and Guided Wave Letters, [online], (Accessed June 24, 2024)


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Created April 1, 1997, Updated November 10, 2018