A Combinatorial Approach to TCO Synthesis and Characterization

Published

October 12, 2021

Author(s)

J D. Perkins, Dennis W. Readey, J. L. Alleman, J A. del Cueto, King C. Li, T J. Coutts, R Stauber, C. H. Duncan, David P. Young, P A. Parilla, B Keyes, L M. Geduilas, Davor Balzar, Q Wang, D Ginley

Abstract

We have developed the deposition, characterization and analysis tools necessary for a combinatorial approach to thin flim metal oxides, with a special focus on transparent conducting oxides (TCOs). We are presently depositing compositionally graded libraries using multi-target sputtering and CVD. The initial collection of characterization tools includes UV/VIS/NIR transmittion/reflection, FTIR reflectance, Raman scattering, 4-point conductivity, thickness, x-ray diffraction and electron microprobe. In addition to allowing for a more complete empirical optimization of TCO properties, we expect to develop an improved basic understanding of TCOs, especially in the area of p-type TCOs. This paper provides an overview of our current combinatorial material science program as applied specifically to TCOs.

Citation

Journal of the Materials Research Society

Pub Type

Journals

Keywords

combinatorial chemistry, CVD, sputtering, transparent conducting oxides

Citation

Perkins, J. , Readey, D. , Alleman, J. , del Cueto, J. , Li, K. , Coutts, T. , Stauber, R. , Duncan, C. , Young, D. , Parilla, P. , Keyes, B. , Geduilas, L. , Balzar, D. , Wang, Q. and Ginley, D. (2021), A Combinatorial Approach to TCO Synthesis and Characterization, Journal of the Materials Research Society (Accessed October 27, 2025)