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Chip-Packaged Silicon Photonic Nanoscale Thermometers



Nikolai N. Klimov, Thomas P. Purdy, Zeeshan Ahmed


We report on the development of on-chip integrated packaged nanoscale silicon photonic themperature sensors capable to detect temperature difference as small as 70 µK, thus showing the potential to replace legacy-based resistance thermometers
Conference Dates
June 5-10, 2016
Conference Location
San Jose, CO
Conference Title
Created December 1, 2016, Updated November 10, 2018