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Houxun H. Miao, Kartik A. Srinivasan, Matthew T. Rakher, Marcelo I. Davanco, Vladimir A. Aksyuk


We report a novel type of fully integrated optomechanical sensor and demonstrate high sensitivity mechanical displacement measurements on chip. We sense the motion of micro and nano-mechanical devices by near field coupling them to high quality factor optical microdisk resonators. In a first geometry, we sense the position of a dielectric ring moved by a micromechanical actuator. Tunable optomechanical coupling of up to g_OM/2π = 4.8 GHz/nm results in the photodetector-limited displacement sensitivity of 4.3x10^-15 m/√Hz with optical excitation power below 20 uW. In a second geometry, we sense the thermal motion of a nanoscale cantilever probe. Transduction of the cantilever’s MHz frequency vibration is achieved with a displacement sensitivity of 4.4x10-16 m/√Hz and a mechanical quality factor of 6000 is measured in vacuum.
Proceedings Title
Transducers 2011
Conference Dates
June 5-9, 2011
Conference Location


cavity optomechanics, MEMS, NEMS, interferometric sensing, optical position measurement


Miao, H. , Srinivasan, K. , Rakher, M. , Davanco, M. and Aksyuk, V. (2011), CAVITY OPTOMECHANICAL SENSORS, Transducers 2011, Beijing, -1, [online], (Accessed May 24, 2024)


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Created June 5, 2011, Updated February 19, 2017