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Capacitive Probe Microscopy



Joseph J. Kopanski


A scanning capacitance microscope (SCM) combines a differential capacitance measurement with an atomic force microscope (AFM). The AFM controls the position and contact force of a scanning probe tip, and a sensor simultaneously measures the capacitance between that tip and the sample under test. The capacitance sensor can detect very small changes in capacitance. The sensor is electrically connected to an AFM cantilevered tip that has been coated with metal to make it electrically conductive. As the SCM/AFM tip is scanned across the sample surface, simultaneous images of topography and differential capacitance are obtained.
Encyclopedia of Imaging Science and Technology


Kopanski, J. (2002), Capacitive Probe Microscopy, Encyclopedia of Imaging Science and Technology (Accessed April 23, 2024)
Created January 14, 2002, Updated October 16, 2008