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Calibration service for instruments that measure laser beam diameter



Shao Yang


This document describes the calibration service for instruments that measure laser beam diameter. An overview of the measurement procedures, measurement system, and uncertainty analysis is presented. A sample measurement report is included in this document that is similar to what is provided to the customer. The measurement report contains an absolute correction factor and a summary of the uncertainty assessment for the device under test.
Special Publication (NIST SP) - 250-87
Report Number


laser beam diameter, laser beam diameter measurement, laser beam profile, slit scan measurement


Yang, S. (2010), Calibration service for instruments that measure laser beam diameter, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed July 24, 2024)


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Created July 1, 2010, Updated February 19, 2017