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Broadband, High-Frequency Permittivity Characterization for Epitaxial Ba1-xSrxTiO3 Composition-Spread Thin Films



Eric J. Marksz, Aaron Hagerstrom, Jasper A. Drisko, James Booth, Nate Orloff, Xiaohang Zhang, Naila Al Hasan, Justin Pearson, Ichiro Takeuchi


Next-generation millimeter-wave (> 30 GHz) telecommunications electronics must be compact, energy efficient, and have good thermal management. Tunable materials may play a role in meeting these requirements for millimeter-wave front-ends, but there are few models or even measurements of tunable dielectrics at these frequencies. Here, we report on the adaptation and development of thin film high-frequency dielectric spectroscopy techniques for composition spread thin films from 100 MHz to 110 GHz. Our comprehensive technique sequentially probes the composition-, frequency-, and electric field-dependence of the complex permittivity in a combinatorial thin film library, which provides a platform to rapidly explore new materials for emerging telecommunications electronics. We demonstrate this technique by applying it to composition-spread Ba1-xSrxTiO3 thin films spanning compositions from 𝑥 = 0 to 𝑥 = 1. The systematic approach to materials growth inherent in combinatorial synthesis allows us to capture a comprehensive picture of the Ba1-xSrxTiO3 system. Our continuous, quantitative measurements provide a multi-dimensional view of the composition-dependent shifts in the dielectric properties at millimeter-wave frequencies for the first time – from strong, few- ps relaxations to no relaxation, and from large relative tunability (𝑛􀯥 > 50 %) to zero tunability – underscoring the utility of our technique, and the need to improve materials for next-generation telecommunications.
Physical Review Applied


tunable, combinatorial, dielectric, ceramic, high-frequency, frequency


Marksz, E. , Hagerstrom, A. , Drisko, J. , Booth, J. , Orloff, N. , Zhang, X. , Al Hasan, N. , Pearson, J. and Takeuchi, I. (2021), Broadband, High-Frequency Permittivity Characterization for Epitaxial Ba1-xSrxTiO3 Composition-Spread Thin Films, Physical Review Applied, [online],, (Accessed April 15, 2024)
Created June 24, 2021, Updated February 23, 2022