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Blazing a Trail

Published

Author(s)

Peter K. Schenck, Debra L. Kaiser

Abstract

In this paper we discuss the application of pulsed laser deposition (PLD) to combinatorial materials research on inorganic thin films. The modifications to an existing PLD apparatus converting it to a dual beam dual target PLD system for the production of compositionally graded library films are detailed. The use of automated spectroscopic reflectometry as a high throughput characterization tool is also discussed. The paper also explains why PLD is a good prototyping tool for thin films and what principles are behind spectroscopic reflectometry.
Citation
Chemistry in Britain
Volume
39
Issue
No. 5

Keywords

combinatorial, high throughput, pulsed laser deposition, reflectometry, spectroscopic, thin films

Citation

Schenck, P. and Kaiser, D. (2003), Blazing a Trail, Chemistry in Britain (Accessed April 20, 2024)
Created May 1, 2003, Updated February 19, 2017