In this paper we discuss the application of pulsed laser deposition (PLD) to combinatorial materials research on inorganic thin films. The modifications to an existing PLD apparatus converting it to a dual beam dual target PLD system for the production of compositionally graded library films are detailed. The use of automated spectroscopic reflectometry as a high throughput characterization tool is also discussed. The paper also explains why PLD is a good prototyping tool for thin films and what principles are behind spectroscopic reflectometry.
Chemistry in Britain
combinatorial, high throughput, pulsed laser deposition, reflectometry, spectroscopic, thin films