Atom Probe Tomography Using a Wavelength-Tunable Femtosecond-Pulsed Coherent Extreme Ultraviolet Light Source

Abstract

We present the instrument design (Figure 1) and initial results from the world’s first EUV radiation-pulsed atom probe tomograph. This instrument uses photon energy-tunable femtosecond-pulsed coherent EUV radiation from phase-matched high harmonic generation in a hollow waveguide. Initial experiments demonstrate EUV (41.85 eV; λ = 29.6 nm) radiation-pulsed field ion emission in SiO2, BaTiO3, GaN, GaN:Mg, GaN/InGaN, Si, and Al. I will compare (Figure 2) time-independent background levels, delayed evaporation tails, peak widths, charge state ratios, multiple hit counts, and the relative number of cluster ions to NUV LAPT (E = 3.5 eV; λ = 355 nm) experiments on the same samples and specimens.