An Atom Probe Tomograph Incorporating a Wavelength-Tuneable Femtosecond-Pulsed Coherent Extreme Ultraviolet Light Source
Ann C. Chiaramonti Debay, Luis Miaja Avila, Paul T. Blanchard, David R. Diercks, Brian Gorman, Norman A. Sanford
Pulsed coherent extreme ultraviolet (EUV) radiation is a potential promising alternative to pulsed infra-red, visible, and near- ultraviolet laser sources for atom probe tomography. In addition to having the benefit of high absorption across the periodic table, EUV radiation may also offer additional athermal field ion evaporation mechanisms through direct photoionization or Auger decay. We have assembled and demonstrate what we believe to be the worlds first EUV radiation-pulsed atom probe tomograph. The instrument consists of a femtosecond-pulsed, coherent EUV radiation source interfaced to a local electrode atom probe tomograph via vacuum manifold. For the first time, atom probe tomography using an EUV light source is demonstrated on various insulating, semiconducting and metallic specimens.