An Atom Probe Tomograph Incorporating a Wavelength-Tuneable Femtosecond-Pulsed Coherent Extreme Ultraviolet Light Source

Published

June 19, 2019

Author(s)

Ann C. Chiaramonti Debay, Luis Miaja Avila, Paul T. Blanchard, David R. Diercks, Brian Gorman, Norman A. Sanford

Abstract

Pulsed coherent extreme ultraviolet (EUV) radiation is a potential promising alternative to pulsed infra-red, visible, and near- ultraviolet laser sources for atom probe tomography. In addition to having the benefit of high absorption across the periodic table, EUV radiation may also offer additional athermal field ion evaporation mechanisms through direct photoionization or Auger decay. We have assembled and demonstrate what we believe to be the world’s first EUV radiation-pulsed atom probe tomograph. The instrument consists of a femtosecond-pulsed, coherent EUV radiation source interfaced to a local electrode atom probe tomograph via vacuum manifold. For the first time, atom probe tomography using an EUV light source is demonstrated on various insulating, semiconducting and metallic specimens.

Citation

MRS Advances

Pub Type

Journals

Download Paper

https://doi.org/10.1557/adv.2019.296

Local Download

Keywords

atom probe tomography, ultra-fast lasers, extreme ultraviolet

Citation

Chiaramonti, A. , Miaja, L. , Blanchard, P. , Diercks, D. , Gorman, B. and Sanford, N. (2019), An Atom Probe Tomograph Incorporating a Wavelength-Tuneable Femtosecond-Pulsed Coherent Extreme Ultraviolet Light Source, MRS Advances, [online], https://doi.org/10.1557/adv.2019.296 (Accessed May 10, 2024)