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Atmospheric Pressure Microplasmas for Modifying Sealed Microfluidic Devices



J K. Evju, P B. Howell, Laurie E. Locascio, Michael J. Tarlov, J J. Hickman


A new DC microdischarge technique for chemical modification of microchannel walls is reported. Our results show that strongly hydrophilic or hydrophobic properties are quickly imparted unto the walls of assembled polymer microchannels in atmospheric pressure plasma consisting of helium and reactant gases. This localized tuning of surface and wetting properties is expected to be useful in the manufacture of microfluidic channels in a variety of substrates. Small area X-ray photoelectron spectroscopy was used to identify oxygen and fluorine on polystyrene surfaces resulting from the plasma treatment.
Applied Physics Letters
No. 10


hydrophobic, microchannel, microdischarge, microfluidic, plasma-treatment, polymer, polystyrene, surface modification, XPS


Evju, J. , Howell, P. , Locascio, L. , Tarlov, M. and Hickman, J. (2004), Atmospheric Pressure Microplasmas for Modifying Sealed Microfluidic Devices, Applied Physics Letters (Accessed April 12, 2024)
Created March 8, 2004, Updated February 17, 2017