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P Sule, L Kotis, L Toth, M. Menyhard, William F. Egelhoff Jr.
Abstract
Low-energy ion-beam intermixing has been studied by Auger depth profiling and by molecular dynamics simulations in Co/Ti and Ti/Co bilayers. The agreement between theory and experiment is satisfactory. Both of them suggest the occurrence of the asymmetry of intermixing at 2 keV ion energy. At lower ion energies the asymmetry vanishes progressively with the decreasing ion energy. Since the Co/Ti system is nearly mass isotropic the ballistic intermixing mechanism can be ruled out and no asymmetry is expected. We argue that atomic size-anisotropy could play some role in the enhancement of interdiffusion in Co/Ti.
Sule, P.
, Kotis, L.
, Toth, L.
, Menyhard, M.
and Egelhoff Jr., W.
(2021),
Asymmetric Enhanced Intermixing in Co/Ti Bilayer, Journal of Applied Physics
(Accessed November 3, 2025)