Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging

Published: February 01, 2007


Simone Lee, Thomas M. Wallis, John M. Moreland, Pavel Kabos, Y. C. Lee


Multimaterial, microelectromechanical systems-based cantilever probes were developed for high-frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated using surface micromachining and bulk microcachining techniques with dielectric silicon nitride and silicon oxide materials on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high-frequency magnetic field. This thermally absorbed power is converted to mechanical deflection by a multimaterials trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in atomic force microscopy systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes.
Citation: Journal of Microelectromechanical Systems
Volume: 16
Issue: 1
Pub Type: Journals

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curvature, high-frequency imaging, microelectromechanical systems (MEMS) cantilever, radio-frequency (RF) probe
Created February 01, 2007, Updated February 19, 2017