Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis



Alain C. Diebold, David A. Wollman, Gene C. Hilton, Kent D. Irwin, John M. Martinis, B. H. Liu


New microcalorimeter x-ray detector technology will revolutionize materials characterization. It is expected that the microcalorimeter EDS (energy dispersive spectrometer) will replace traditional lithium-drifted silicon semiconductor EDS due to its superior energy resolution (< 4 eV FWHM) and greatly enhanced capability for characterizing low energy x-rays. In this paper, we describe the transition-edge sensor microcalorimeter developed at NIST and demonstrate its superior capability using x-ray spectra of size, sub-micrometer-diameter particles on silicon surfaces.
Solid State Phenomena


energy dispersive spectrometer, microcalorimeter, x-ray


Diebold, A. , Wollman, D. , Hilton, G. , Irwin, K. , Martinis, J. and Liu, B. (1999), Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis, Solid State Phenomena (Accessed April 14, 2024)
Created November 30, 1999, Updated October 12, 2021