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PUBLICATIONS

Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis

Published

Author(s)

Alain C. Diebold, David A. Wollman, Gene C. Hilton, Kent D. Irwin, John M. Martinis, B. H. Liu

Abstract

New microcalorimeter x-ray detector technology will revolutionize materials characterization. It is expected that the microcalorimeter EDS (energy dispersive spectrometer) will replace traditional lithium-drifted silicon semiconductor EDS due to its superior energy resolution (< 4 eV FWHM) and greatly enhanced capability for characterizing low energy x-rays. In this paper, we describe the transition-edge sensor microcalorimeter developed at NIST and demonstrate its superior capability using x-ray spectra of size, sub-micrometer-diameter particles on silicon surfaces.
Citation
Solid State Phenomena
Volume
65-66
Pub Type
Journals

Keywords

energy dispersive spectrometer, microcalorimeter, x-ray

Citation

Diebold, A. , Wollman, D. , Hilton, G. , Irwin, K. , Martinis, J. and Liu, B. (1999), Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis, Solid State Phenomena (Accessed April 23, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 30, 1999, Updated October 12, 2021