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Anisotropic Acoustodynamics in Gigahertz Piezoelectric Ultrasonic Transducers

Published

Author(s)

Jingjie Cheng, Zhaoliang Peng, Penghui Song, Bo Peng, Jason J. Gorman, Justin Kuo, Amit Lal, Wenming Zhang, Lei Shao

Abstract

In this work, we employed our newly developed optical imaging method to probe detailed acoustodynamic physics in gigahertz (GHz) unreleased ultrasonic transducers based on an AlN-on-silicon system, revealing mode superposition, anisotropic transduction, and dynamic mode evolution. Superpositioned upon the dominant breathing mode along the vertical direction of the AlN layer, multiple resonant lateral modes are identified, and they are shown to evolve into a surface mode beyond the piezoelectric transduction envelope, with strong anisotropic transduction brought by the shear motion of silicon. This acoustodynamic property is important for verifying and further improving design theories of broadband piezoelectric transducers and thin film piezoelectric-on-substrate systems in general.
Citation
IEEE Electron Device Letters
Volume
43
Issue
7

Keywords

Piezoelectric micromachined ultrasonic transducers, PMUT, acoustodynamics, gigahertz ultrasonics, superposition, anisotropy.

Citation

Cheng, J. , Peng, Z. , Song, P. , Peng, B. , Gorman, J. , Kuo, J. , Lal, A. , Zhang, W. and Shao, L. (2022), Anisotropic Acoustodynamics in Gigahertz Piezoelectric Ultrasonic Transducers, IEEE Electron Device Letters, [online], https://doi.org/10.1109/LED.2022.3179205 , https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934855 (Accessed March 3, 2024)
Created May 30, 2022, Updated November 29, 2022