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Active Vibration Isolation for a Long-Range Scanning Tunneling Microscope



K J. Lan, J Y. Yen, John A. Kramar


Vibration Isolation or control is critical for the optimum operation of the Molecular Measuring Machine (M3), a high-resolution, length-metrology instrument at the National Institute of Standards and Technology. This paper describes the extension of the M3 Mallock suspension system from passive to six degrees-of-freedom (DOF) active vibration isolation. System modeling is presented and experimental system identification is carried out for model verification. The paper then compares the vibration isolation performance using a classical proportional-integral-derivative (PID) controller versus using a more modern, model-based, Linear-Quadratic-Gaussian (LQG) controller. Attenuation of 3 dB to 15 dB is achieved within the active vibration isolation control bandwidth, and images taken with the M3 scanning tunneling microscope (STM) probe show the improved performance.
Asian Journal of Control


active vibration isolation, linear-quadratic-gaussian, LQG control, Mallock suspension system, scanning tunneling microscope, STM


Lan, K. , Yen, J. and Kramar, J. (2004), Active Vibration Isolation for a Long-Range Scanning Tunneling Microscope, Asian Journal of Control (Accessed June 24, 2024)


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Created May 31, 2004, Updated October 12, 2021