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Active Vibration Isolation for a Long-Range Scanning Tunneling Microscope
Published
Author(s)
K J. Lan, J Y. Yen, John A. Kramar
Abstract
Vibration Isolation or control is critical for the optimum operation of the Molecular Measuring Machine (M3), a high-resolution, length-metrology instrument at the National Institute of Standards and Technology. This paper describes the extension of the M3 Mallock suspension system from passive to six degrees-of-freedom (DOF) active vibration isolation. System modeling is presented and experimental system identification is carried out for model verification. The paper then compares the vibration isolation performance using a classical proportional-integral-derivative (PID) controller versus using a more modern, model-based, Linear-Quadratic-Gaussian (LQG) controller. Attenuation of 3 dB to 15 dB is achieved within the active vibration isolation control bandwidth, and images taken with the M3 scanning tunneling microscope (STM) probe show the improved performance.
Lan, K.
, Yen, J.
and Kramar, J.
(2004),
Active Vibration Isolation for a Long-Range Scanning Tunneling Microscope, Asian Journal of Control
(Accessed March 28, 2024)