, K.
and Sobolewski, M.
(2005),
2-D Imaging of Temperature in CF<sub>4</sub> Plasmas, IEEE Transactions on Plasma Science
(Accessed May 6, 2024)
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2-D Imaging of Temperature in CF4 Plasmas
Published
Author(s)
,
Abstract
Two-dimensional maps of rotational temperature were determined in CF4 plasmas using planar laser-induced fluorescence of CF. Experiments were performed in a capacitively-coupled, parallel plate plasma reactor at pressures from 200mTorr (26.7Pa) to 800mTorr (107Pa) and powers of 10W to 30W. Temperatures, which ranged from 273 15 K to 480 15 K, increased with pressure and power and were fairly axially symmetric with radial gradients. Temperature gradients, such as those observed here, can have a strong impact on density measurements that probe a single rotational level, as well as on reaction rate constants and interpretation of density gradients.Citation
IEEE Transactions on Plasma Science
Volume
33
Issue
No. 2
Pub Type
Journals
Keywords
CF4, fluorocarbon, laser-induced fluorescence, planar laser-induced fluorescence, plasma, PLIF, temperature
Citation
Created April 1, 2005, Updated February 17, 2017