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Current work in x-ray computed tomography centers on diffraction effects in micro CT and computed tomography of integrated circuit interconnects.


As scale lengths get smaller, diffraction becomes increasingly prominent in tomography. The work here develops diffraction tomography for laboratory sources.

A new laboratory scale instrument at NIST/Boulder is dedicated to tomography of integrated circuit interconnects. Tomography software written in-house is being used to perform reconstructions.

Major Accomplishments

  • A study showing that volumetric measurements can reduce the variation in size measurements of ideal objects compared to the standard RECIST measurement by a factor of ten
  • Development of a low-cost device capable of reproducing lengths within a CT to better than 0.1 mm with data acquired with 0.6 mm voxels
  • Identification of a commercially available foam for use as a density reference
Created November 8, 2016, Updated March 10, 2021